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Scheduling Semiconductor Fabs

Semiconductor manufacturing

The semiconductor manufacturing environment is unique and extremely complex. The process typically consists of four main sub-processes/stages [Uzsoy et al. 1992]:
  • Wafer fabrication
  • Wafer probe
  • Wafer assembly
  • Wafer testing
In the wafer fabrications stage, the basic integrated circuit (IC) is built up layer by layer by going through complex processing steps such as photolithography, etching and diffusion in factories known as wafer fabs. The wafer fabrication stage is the most complex stage of production, typically consisting of 300 to 500 process steps which are performed by complex tool-groups. Each of the mix of products has its own process flow with a certain number of steps in the flow. In wafer probe, the newly manufactured circuits are tested for basic functionality and the functioning IC’s are sent ahead to the wafer assembly stage where they are packaged. In the final step, the packaged IC’s are tested for quality and reliability before being sent to the customer. Figure 1, is a step-wise representation of the wafer fabrication stage.

Scheduling semiconductor manufacturing is very complex

The problem of developing an optimal production schedule in the horizon of a week to a day for a semiconductor manufacturing system is an extremely hard problem due to:
  • Large number of process steps for each wafer
  • Stochastic nature of the yields and process
  • Re-entrant flows
  • Large number of jobs
  • Large number of machines / tools
  • Sequence dependent changeover times
Optessa MLS is offered in a special configuration, called Optessa MLS-SC, for semiconductor manufacturing scheduling. The system uses modern stochastic search techniques to rapidly find a near optimal solution, even for large problems.

Optessa MLS applied to sequencing and scheduling semiconductor fabs

Optessa provides the most advanced manufacturing sequencing and scheduling software available today. It has been deployed by some of the world’s largest and most innovative manufacturers.

Optessa MLS-SC can generate a schedule that optimizes a cost function, after considering all rules and constraints. The computational engine at the core of Optessa MLS-SC optimizes the entire solution by a multi-pass iterative process involving millions of evaluations. This is a superior approach to simple dispatching heuristics, one pass schemes or those based on classical OR techniques. The result will be a high quality schedule that maximizes resource utilizations, minimizes changeovers and delays, and reduces costs. The user will not be required to spend several hours manually adjusting the generated sequence, as is the case with suboptimal solution techniques.

Optessa MLS-SC considers the following requirements/complexities in semiconductor manufacturing scheduling:
  • Rescheduling
  • Re-entrant Flows
  • Non Uniform Load
  • Setup Times
  • Downtimes
  • Rework
  • Rejection of Lots
  • Hot Lots
  • Matching of Tools
  • Auxiliary Resources
  • Test/Monitor Wafers
  • Send Ahead Wafers
  • Trial Lots
  • Processing Time-Windows
  • Utilization of resources
  • Integration with MES
  • Manual Overrides
  • Rules/Constraints for Scheduling

 

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