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The operations of semiconductor tools are
controlled by a tool controller. In a cluster tool, for example, the
Controller coordinates the movements of the Robot(s) between Loadlocks
and Reactors.
Scheduling semiconductor tools requires interfacing
to the tool Controller. Scheduling will be driven by the Controller.
The scheduling system must be able to respond to real time scheduling
systems from the Controller.
The Optessa MLS-SC
software can be deployed and used on complex tools used in
semiconductor manufacturing to generate an optimal schedule/sequence of
operations on that tool; for example, on cluster tools, wet-sink
stations etc. Some of the capabilities of Optessa MLS-SC:
- The
system can be used to maximize throughput through the tool while
simultaneously considering all other production rules and constraints.
- The scheduler will optimally co-ordinate the
activities of transfer, processing of wafers on the tool.
- The scheduler will ensure that the right resources
have to be available at the right time, i.e., it will eliminate any
delays or minimize “non-productive” work.
- The scheduler will respond in real-time to random
occurrences such as tool failure, downtime, alarms etc.
- In
contrast to dispatching systems that (which are commonly used on these
tools), operate on the basis of local information, Optessa MLS-SC generates
an initial optimal schedule that takes into account the global state.
- Further, changes are handled by re-optimizing,
also considering the global state. Given this, Optessa MLS-SC can
make truly intelligent decisions that provide long-term benefits, such
as improving the overall utilization of resources within the system.
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